Basis OEM Gas Flow Controllers

Specification 100 SCCM to 20 SLPM available flow measurement range 0.01% to 100% of full scale control range Available gases: Air, Ar, CH4, H2, He, N2, N2O, O2 ±1.5% of reading accuracy for most ranges and gases ±0.25% of reading or ±0.05% of full scale repeatability 0°C to +50°C Operating Temperature 145 psig max operating pressure for 5 SLPM and below 25°C & 1 atm STP <1 minute warm up time 100 ms control response time Cable not included. Evaluation cable available for purchase. Specification Sheet