Round Vacuum Chucks for KW-4A spin coater, shipping included

The high precision aluminum vacuum chucks are designed and fabricated to use on KW-4A spin coater of MicroNano Tools in order to maximize your flexibility with your specific research and development objectives. The standard round vacuum chucks are made for round substrate/wafer sizes of 5,10, 12.5, 15, 17.5, 20, 25, 30, 35, 40, 50, 60, 70, 75, and 100 mm. Vacuum chucks of other sizes or ultra thin or ultra thick are also available at additional cost. For ultra thin substrate to be coated, its smallest thickness is 0.025 mm (0.001 inch) and its lateral size should be equal or larger than 30x30 mm. The structure of vacuum chucks for ultra thin samples are different from that of conventional vacuum chuck. It has micro holes at the bottom plate and has a cover plate. It is also called complex vacuum chuck. Diameter of wafers SHOULD ALWAYS slightly larger than that of the vacuum chucks with vacuum channels on it. Otherwise, the coating chemicals may be sucked into the vacuum system. A good