
TEL Tokyo Electron IRAS Interface Robotic Arm Sub Lithius 5087-403675-12 Surplus
img{max-width:100%} TEL Tokyo Electron IRAS Interface Block Robotic Arm Sub Lithius 5087-403675-12 Surplus Model No: IRAS (LITHIUS IPL), XT-AXIS Interface Block Robotic Arm Sub Removed from a TEL Tokyo Electron Clean Track Lithius System Installed Components PCB Part No: MPC-T0048A-11, BOARD, IO MTR #02, TOB1048 PCB Part No: BOARD, CONN IL #02, HA-016 PCB Part No: BOARD, IF FN #01, HA-017 Daikin Industries FFU Part No: DFS410TC1B Neurofine Part No: MMH4601000 Mitsubishi Industrial Robot and Track Mitsubishi Industrial Robot Controller Part No: RC-1UHC-SAT07 Mitsubishi Capacitor Part No: MR-J2S-BC001-QE Mitsubishi MELSERVO Driver Part No: MR-J2S-20A-PQ108T020, SVX Mitsubishi MELSERVO Driver Part No: MR-J2S-20A-PQ108T021, SVY Mitsubishi MELSERVO Driver Part No: MR-J2S-20A-PQ108T022, SVZ Mitsubishi MELSERVO Driver Part No: MR-J2S-20A-PQ108T023, SVT Parts List Assembly Part No: 5087-403675-12, IRAS (LITHIUS IPL), XT-AXIS 5080-192610