C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality
$187.00
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This Standard was technically approved by the Gases Global Technical Committee. Available at www.semi.org in July 2001; originally published in 1995. NOTICE: This Document was balloted and approved for withdrawal in 2001. Trifluoromethane (CHF3) is a colorless, nonflammable, noncorrosive gas with a slight ethereal odor. It is shipped in cylinders as a liquefied gas under its own vapor pressure. Referenced SEMI StandardsNone.
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