C03500 - SEMI C35 - Specification and Guide for Nitric Acid

 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1  Purpose1.1  The purpose of this Standard is to standardize requirements for nitric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods can be used as long as method validation per SEMI C1 has been demonstrated. This Standard also provides a guide for a grade of nitric acid for which a need has been identified. In the case of this Guide, the test methods may not have been statistically validated yet.2  Scope2.1  The scope of this Standard is grades of nitric acid used in the semiconductor industry. Referenced SEMI Standards (purchase separately)SEMI C1 — Guide for the Analysis of Liquid ChemicalsSEMI C27 — Specification and Guide for Hydrochloric AcidSEMI C44 — Specification and Guide for Sulfuric Acid Revision HistorySEMI C35-0118 (technical revision)SEMI C35-0708 (technical revision)SEMI C35-0301 (technical revision)SEMI C35-0699 (first published - replaces SEMI C1.12, SEMI C7.6, and SEMI C8.6)