C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems

1 Purpose1.1 This standard specifies extraction limits for metals from liquid chemical distribution system components (e.g., tubing, fittings, and valves).1.2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components.2 Scope2.1 This Standard applies to the determination of metal extractable impurity characteristics of high purity materials and the wetted surfaces of components and equipment used in chemical distribution systems.2.2 This Standard establishes limits on impurities extractable from components.NOTE 1: Although no limits are imposed on extractable contaminants from resin pellets by this Specification, Related Information 1 provides a table of typical values.2.3 This Standard includes instructions to prepare extractants for analysis by exposing raw materials, components, or assemblies to nitric acid.2.4 This Standard defines preparation and pr