C09100 - SEMI C91 - Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components

NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI F118.   This Test Method describes the procedure for determination of the moisture dry-down characteristics of components used in gas delivery systems. The results of this test can be used for the qualitative ranking of gas delivery components based on the design as it relates to moisture dry-down performance of the system. This Test Method applies to all types of in-line components used in gas delivery systems for precise delivery of gaseous species used in semiconductor manufacturing. The in-line components applicable are valves (pneumatic, manual and hybrid types), mass flow controllers (MFCs), pressure regulators, filters and passive components such as pressure gauges/transducers and flow meters.   Test Medium — The test medium shall be nitrogen. Other inert gases will have different purging characteristics and may dry a system more quickly or slowly. Reactive gases s