E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF)

NOTICE: SEMI E19.4 and SEMI E19.5 are no longer published within the SEMI E19 family of Standards. They are each published and sold separately.    This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 1216. Available at www.semiviews.org and www.semi.org in April 2017; originally published in 1991; previously published January 2017.   Note: This Standard has been purposely restricted to 100 mm (4 in.), 125 mm (5 in.), and 150 mm (6 in.) versions of the SMIF port. This has been done to establish a base for SMIF port standardization. Aspects of the 200 mm (8 in.) version have been negotiated by interested parties and published as SEMI E19.4. 　 A standard interface is required for containers intended to control the transport environment of cassettes containing wafers or disks. The interface must address the proper conta