E04000 - SEMI E40 - Specification for Processing Management

 This Standard specifies the application of the appropriate processing to specified material received at the processing agent. It describes the concepts of material processing, the behavior of the equipment in relation to processing, and the messaging services which are needed to accomplish the task. The communications services defined here enable standards-based interoperability of independent systems. They allow application software to be developed that can assume the existence of these services and allow software products to be developed which offer them. Implementation of automated processing management will help eliminate misprocessing of material. The adoption of the standards described will greatly reduce the effort required to integrate compliant equipment components and reduce time to set up for processing. Compliance requires a minimal but specific set of standard services.The scope of this Standard is automated material processing based on discrete processing jobs. It provid