E05600 - SEMI E56 - Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published November 2004; previously published August 2015. 　 The purpose of this Document is to provide a standardized method to quantify the accuracy, linearity, repeatability, short-term reproducibility, hysteresis, and dead band of a thermal mass flow controller (MFC). 　 The intent of this Document is not to suggest any specific testing program but to specify the test method to be used when testing for parameters that are covered by this method. The user might use this Document to check significant performance characteristics such as accuracy, precision, bias, repeatability, linearity, short-term reproducibility, and dead band under a set of closely controlled test conditions. 　 The significance of the accuracy calculations