E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 11, 2016. Available at www.semiviews.org and www.semi.org in June 2016; originally published in 1996; previously published November 2010. 　 This Standard specifies the mechanical couplings used to ergonomically align and precisely support 300 mm wafer carriers (including transport cassettes, process cassettes, quartz boats, pods, lot boxes, and shipping boxes). Such a kinematic coupling can be used at several interfaces, including: between a box or cassette and a tool load-port or vehicle nest, between a transport cassette and a box, and between a process cassette or quartz boat and the floor of a process chamber. 　 This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability