E06300 - SEMI E63 - Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

This Standard specifies the tool side of the mechanical interface between the main part of a process or metrology tool and the component that opens boxes and presents the boxes to the tool wafer handler for unloading and loading 300 mm wafers. The box opener/loader unit would include one or more load ports (that would conform to SEMI E15.1) as well as storage capacity for empty boxes or waiting lots (if needed by the tool throughput). The box opener/loader unit might not only be configured to handle boxes (that would conform to SEMI E47.1 and SEMI E62) but also to open cassettes (that would conform to SEMI E1.9). This Standard defines one interface for all such carriers and for any carrier capacity (13 and 25 wafers).This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Only the mechanical interface is specified; no materials requirements or micro-con