E08700 - SEMI E87 - Specification for Carrier Management (CMS)

 * This Standard has the option to purchase the Current document with a Redline document (Current + Redline). The Redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the Redline document and the Current document, the Current version is the official and authoritative version. 1  Purpose1.1  This Specification provides a standardized behavior for host view communication with production equipment during the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space.2  Scope2.1  This Specification covers host and equipment communication for SEMI E15.1, 300 mm load ports.2.2  This Specification defines standards that facilitate the host’s knowledge and role in automated and manual carrier transfers, as well as internal buffer equ