E08900 - SEMI E89 - Guide for Measurement System Analysis (MSA)

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.NOTICE: This Document was reapproved with minor editorial changes. The purpose of this Guide is to provide a consistent set of terminology and describe a simplified, but constructive, experimental approach to planning and performing a measurement system analysis (MSA). The goal of an MSA is to characterize the performance capability of the measurement system (MS) as it is intended to be used in a manufacturing or laboratory setting. Accurately identifying the MS bias and the size and nature of all sources of variability allows one to determine whether the MS is capable of performing its intended function. Moreover, a well-designed MSA can be used to identify and quantify areas that need the most improvement.This Guide covers procedures for determining specifi