E09000 - SEMI E90 - Specification for Substrate Tracking

 NOTICE: By purchasing this download, you will receive the Primary Standard and the Subordinate Standards. 1  Purpose1.1  The purpose of this Specification is to provide the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. This Specification defines the concepts and behaviors for the information management of substrates, as well as the messages/services.2  Scope2.1  Essentially, information about substrates must be managed by the factory system, while the equipment is required to provide the services for the substrate information management. This Specification addresses the requirement for the equipment services to manage information of substrates that reside in the equipment.2.2  The scope of this Specification is to define the information services of equipment that can be requested by the user. To clarify required services, the concepts and behaviors of the substrate, the substrate location, the batch and the batch location are def