E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM)

Purposes of the Object-Based Equipment Model include the following: Define a standard model for interfacing to multi-process equipment and other complex equipment. Define standard equipment components so that communications can "discuss" component-related issues. Provide an equipment model that can be easily integrated with SEMI E81 CIM Framework systems by connecting an OBEM-compliant equipment to a Machine object. The purpose of the Object-Based Equipment Model (OBEM) standard is to provide definitions, services, and behavior, as seen through communications with the factory, for the common types of physical and logical objects of which equipment is typically composed, including the equipment itself. The definition of standardized objects allows the equipment to describe its makeup to the factory and provides the factory visibility into the equipment. This is a provisional standard that defines concepts, behavior, and services to support the integration of productio