E12700 - SEMI E127 - Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008. Originally published July 2003; previously published November 2007.   The purpose of integrated measurement (metrology or inspection) is to facilitate intra-equipment process monitoring through rapid access to measurement data, reduce material handling between process and measurement equipment, and the opportunity to increase process monitoring with minimal or no decrease in throughput. The benefits of integrated measurement also allow Advanced Process Control systems to use the results with reduced feedback lag time. The purpose of the IMMC specification is to provide an object-based specification of an Integrated Measurement Module together with a standard interface between an integrated measurement module and its control and data por