E13400 - SEMI E134 - Specification for Data Collection Management

 NOTICE: By purchasing this download, you will receive the Primary Standard and the Subordinate Standards. 1  Purpose1.1  This Specification describes a method for data acquisition EDA Applications to request process and data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the EDA Application. It includes a mechanism for organizing related data into groups to make it more straightforward for enabling or disabling a large number of data sources, and to allow EDA Applications to organize related data into groups according to their purpose.2  Scope2.1  This Specification provides a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan. This Specification defines what form a data collection plan takes, the meaning of its contents, and an interface for managing them that is to be supported by the equipment.2.2  This Specification defines the behavior associated w