E13900 - SEMI E139 - Specification for Recipe and Parameter Management (RaP)

This Standard was technically approved by the global Information & Control Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 16, 2009 Available at www.semiviews.org and www.semi.org in December 2011. Originally published March 2005; previously published March 2010.   NOTICE: The designation of SEMI E139 was updated during the 1211 publishing cycle to reflect the changes to SEMI E139.1 and SEMI E139.3.   The purpose of this Specification is to specify the cooperative interaction between the factory information and control system (FICS) and the equipment to manage the specifications of equipment processing (for instance, equipment recipes).   Subordinate Standards: SEMI E139.1-0310 — XML Schema for the RaP PDE SEMI E139.2-1108 — SECS-II Protocol for Recipe and Parameter Management (RaP) SEMI E139.3-1211 — XML/SOAP Binding for Recipe and Parameter Management 　 Referenced SEMI StandardsSEMI E4 — SEMI Equipm