E14200 - SEMI E142 - Specification for Substrate Mapping

 1  Purpose1.1  This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays.2  Scope2.1  This version of the Specification applies to the substrate types: wafers, frames, strips, and trays.2.2  This Specification addresses assembly and packaging including the testing of semiconductor devices. Subordinate Standards (included)SEMI E142.1 — Specification for XML Schema for Substrate MappingSEMI E142.2 — Specification for SECS II Protocol for Substrate MappingSEMI E142.3 — Specification for Web Services for Substrate MappingSEMI E142.4 — Specification for SECS II Protocol for Substrate Mapping Using Item Transfer Referenced SEMI Standards (purchase separately)SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)SEMI E39 — Specification for Object Services: Concept, Behavior, and Services Revision HistorySEMI E142-0225 (technical revision)SEMI E142-0224E