E16400 - SEMI E164 - Specification for EDA Common Metadata

The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description.   The scope of this Specification includes: - Common approaches for defining specific elements of equipment metadata - The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor factories   This Specification defines equipment metadata based on SEMI E125-0710 and SEMI E120-0310.   This Specification applies only to production equipment that act on substrates.   Referenced SEMI Standards (purchase separately) SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services SEMI E40 — Specification for Processing Management SEMI E87 — Specification for Carrier Management (CMS)