E16900 - SEMI E169 - Guide for Equipment Information System Security

 The purpose of this Standard is to establish a common basis for equipment information system security. This can be shared among users and suppliers of semiconductor manufacturing equipment, suggesting concepts, and measures of information security. This Standard is expected to: Provide guidelines of applying appropriate security measures for equipment to optimize cost, delivery, and reliability. Make the design of user security systems easier and more robust by providing knowledge of the role and responsibility of equipment in the factory. Provide a common language to express the needs and evaluation methods of, and gain a consistent understanding within, the industry.  Promote an open standard to provide a portable and interoperable implementation. This Standard covers the domain of semiconductor manufacturing equipment operation. The domain includes:Entities (person, process, system) that interact with the equipment, Data objects of the equipment operation, and Embedded information