F07200 - SEMI F72 - Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components

NOTICE: This Document was reapproved with minor editorial changes.   The purpose of this Document is to define a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system. This Test Method is intended to be applied to the wetted surfaces of stainless steel tubing, fittings, valves, and other components as a measure of the effectiveness of passivation.   This Document defines a method of testing the wetted surfaces of stainless steel tubing, fittings, valves, and other components to determine the surface and near-surface composition as a measure of the effectiveness of passivation processes.   The objective of this Test Method is to describe a general set of instrument parameters and conditions that will achieve reproducible measurements within the chromium-enriched passive oxide layer. This Document describes a test method to characterize the composition and thi