F102000 - SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems

This Standard was technically approved by the Facilities Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 1, 2013. Available at www.semiviews.org and www.semi.org in May 2013; originally published March 2006. 　 This Standard establishes the guide for selecting "Specifications for Dimension of Components for Surface Mount Gas Distribution Systems."   This Standard applies to "Specifications for Dimension of Components for Surface Mount Gas Distribution Systems" (SEMI F82, SEMI F83, SEMI F84, SEMI F85, SEMI F86, SEMI F87, SEMI F88, SEMI F89, SEMI F90, SEMI F91, SEMI F92, SEMI F93, SEMI F94, and SEMI F95). 　Referenced SEMI StandardsSEMI F82 — Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution Systems SEMI F83 — Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distrib