MF004300 - SEMI MF43 - Test Method for Resistivity of Semiconductor Materials

The resistivity of a semiconductor material is an important materials acceptance requirement. Resistivity determinations made during device fabrication are also widely used for quality control purposes. This Test Method covers two procedures which are widely used for making routine measurements.The two test methods in this Standard are as follows: Method A, Two-Probe and Method B, Four-Probe. In general, resistivity measurements are most reliable when made on single crystals, since with such material local variations in impurity which affect the resistivity are less severe. Localized impurity segregation at grain boundaries in polycrystalline material may result in large resistivity variations. Such effects are common to either of the measurement test methods but are more severe with the four-probe test method, and its use, therefore, is not recommended for polycrystalline material. The values stated in SI units are to be regarded as the standard. The values given in parentheses are fo