S00200 - SEMI S2 - 半導體製造設備安全衛生及環保基準

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. 注意：這個翻譯是一個參考版本。如果您在使用上，發現中文翻譯版本與英文原文版本產生任何差異或是不確定之處，請務必參考英文原文版本，並以英文原文版本為主，英文原文版本屬於正式和權威的版本。   注意：標示“註”的章節並不是此安全基準之正式條文，且沒有意圖要修改或取代正式標準或安全基準。這些由全球技術委員會提出的章節是用來強化標準或安全基準之應用。   本安全基準意在建立一套以功能性為基礎的半導體製造設備的環保、健康及安全基準考量。 適用性 — 本基準應用於製造、量測、封裝及測試半導體產品之設備。   各章節需求的優先順序 — 如果在本基準各章節間的條款內容有所衝突，則提出特定技術問題的主次章節優先於一般概述性的主次章節。  Referenced SEMI Standards (purchase separately)SEMI E6 — Guide for Semiconductor Equipment Installation DocumentationSEMI F5 — Guide for Gaseous Effluent HandlingSEMI F14 — Guide for the Design of Gas Source Equipment EnclosuresSEMI S1 — Safety Guideline for Equipment Safety LabelsSEMI S3 — Safety Guideline for Process Liquid Heating SystemsSEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing EquipmentSEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company QualificationsSEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing EquipmentSEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation ProcessSEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment DecontaminationSEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing EquipmentSEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing EquipmentSEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment