S00300 - SEMI S3 - Safety Guideline for Process Liquid Heating Systems

This Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in October 2017; originally published in 1991; previously published December 2011. 　 E This Standard was editorially modified in make corrections that were approved outside of the normal reapproval process. 　 NOTICE: Paragraphs entitled NOTE are not an official part of this Document and are not intended to modify or supersede it. 　 NOTICE: Conformance to provisions containing the word ‘should’ is necessary to declare conformance to this Document. Conformance to those provisions containing ‘may,’ ‘suggested,’ ‘preferred,’ or ‘recommended,’ or to NOTES or Related Information is not necessary to declare conformance. 　 The purpose of this Safety Guideline is to provide minimum general safety considerations for the design and