S01000 - SEMI S10 - Safety Guideline for Risk Assessment and Risk Evaluation Process

E This Safety Guideline was editorially modified in December 2023 to add Note 9 and to correct a processing error. Changes were made to §§ 6.1.3, 6.10.2.2.4, 6.10.2.2.4.1, and 6.10.2.2.4.2. The primary purpose of this Safety Guideline is to define a consistent means of risk estimation which can be invoked by other SEMI Safety Guidelines. A secondary purpose of this Safety Guideline is to describe, generally, several other aspects of risk assessment (e.g., assembling information and personnel, hazard identification) and of risk control (e.g., risk evaluation and risk reduction). This Safety Guideline provides a procedure for carrying out risk assessments on equipment in the semiconductor and similar industries and is intended for use by suppliers and purchasers as a reference for EHS considerations. This Safety Guideline is also intended to assist in the development of strategies to prioritize and control risks.This Safety Guideline is intended to apply to the assessment of risks throug