S01800 - SEMI S18 - Environmental, Health and Safety Guideline for Flammable Silicon Compounds

This Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at www.semiviews.org and www.semi.org in August 2018; originally published November 2002; previously published March 2012. 　 This Safety Guideline is intended as a minimum set of safety and health criteria for storage, handling, and use of flammable silicon compounds from supply to abatement. 　 This Safety Guideline is also intended as a minimum set of safety and health design criteria for semiconductor, FPD, PV manufacturing equipment and other equipment that uses flammable silicon compounds for processing.   Flammable silicon compounds that are within the scope of this Safety Guideline are shown in Table 1. 　 Flammable mixtures containing flammable silicon compounds included in the Table 1 are also within the scope of this Safety Guideline. 　 In some sectio