
TEL Tokyo Electron 300mm Wafer PRA Process Block Robotics Arm Lithius Incomplete
img{max-width:100%} TEL Tokyo Electron 300mm Wafer PRA Process Block Robotics Arm Lithius Incomplete Model No: PRA X AXIS ASSY Process Block Robotics Arm Removed from a TEL Tokyo Electron 300mm Clean Track Lithius System Sold As-Is Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5085-407036-19 X AXIS ASSY 5010-101146-12 BASE,(X)UPPER 1 5010-101147-13 BASE(X),LOWER 1 5004-400017-12 ARM(X1-1) (509510045511 1 5010-305344-11 SUPPORT(X1-1) 1 5004-400018-11 ARM(X2-1) (509510045511 1 5010-306532-11 ARM(X2-2) 1 5010-305345-12 SUPPORT(X2-1) 1 5004-400019-11 ARM(X3-1) (509510045511 1 5010-306533-11 ARM(X3-2) 1 5010-305346-11 SUPPORT(X3-1) 1 5004-400015-11 CLAMP,BELT (509510045411 6 5010-401565-12 PLATE 5 5010-404925-11 STOPPER(X-1) 3 5010-404926-11 STOPPER(X-2) 6 5010-305873-11 SUPPORT(X-2) 1 5010-305987-11 SUPPORT(X2-2) 1 5010-306512-12 STAY,SUPPORT 1 5010-405028-11 COVER,CABLE