TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork
img{max-width:100%} TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork Part No: 51161-802-001 Model No: Interface Block Robotic Arm Main IRAM Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components NSK Robot Servo Motor Part No: M-SSB020FN502 NSK Linear Stage Slide Part No: XY-HRS025ZRS202 Parts List Assembly Part No: 5087-403668-12, IRAM (LITHIUS IPL), X-AXIS 5080-192746-11: BASE,FORK IRAM XY-P5179 (Qty. 1) 5080-193009-11: PLATE(X),TOP XY-P5205 (Qty. 1) 5090-193008-11: COVER(X),TOP XY-P5204 (Qty. 1) 5080-193010-11: COVER(X),SIDE XY-P5206 (Qty. 2) 5080-192744-11: BELT(X),UPPER IRAM XY-P5178 (Qty. 1) 5080-193011-11: SPACER(X),BELT XY-P5207 (Qty. 1) 5080-193007-11: BASE(X),IRAM XY-P5263 (Qty. 1) 5080-193013-11: BRACKET(X),FRONT XY-P5209 (Qty. 1) 5080-192467-11: PHOTOSENSOR,IRAM X #01 XY-L3477 (Qty. 1) 5080-192468-11: PHOTOSENSOR,IRAM X #02