C00100 - SEMI C1 - Guide for the Analysis of Liquid Chemicals

Liquid Chemicals are used extensively during the production of semiconductor devices; their purity has been shown to affect the device yield during the manufacturing processes. 　 Since there is a wide range of semiconductor devices being produced, different levels of purity have been established as standards and guidelines for each liquid chemical. 　 This Guide describes the various analytical procedures for standards verification procedures required to meet a specific liquid chemical specification.   All liquid chemical standards consist of guidelines, specifications and validated analytical procedures. Suitable analytical procedures are defined in each standard for each grade of liquid chemical such that their sensitivity meets the requirements of each of the respective grades of liquid chemicals. 　 This Guide provides an overview of each of the methods used for liquid chemical certification. Each grade of liquid chemicals (1–5) that have been validated analytically using the appropriate procedures described in this Guide can be described as ‘meeting SEMI Specifications.’ 　 Analytical Procedures — The procedures used to establish a liquid chemical specification can be found in § 7. The Analytical Procedures are listed in Table 1. 　 Safety — Because of the continuing evolution of safety precautions, it is impossible for this publication to provide definite statements related to the safe handling of individual liquid chemicals. The user is referred to product labels, product data sheets, government regulations, and other relevant literature. 　Referenced SEMI StandardsNone.