F04100 - SEMI F41 - Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in November 2016; originally published June 1999. 　 NOTICE: This Document was completely rewritten in 2016. 　 This Guide sets forth a logical and systematic approach to the qualification of bulk chemical distribution systems (BCDS) that may be used by end users and suppliers as a basis for developing site-specific BCDS specifications.   The qualification processes cover: Bulk distribution systems for large transfer facilities such as main unloading tank facilities that would transfer to smaller day tanks or transport vessels. 　 Bulk distribution systems at the facility level that receive from another system and dispense fab wide or to multiple points of use. 　 Bulk distribution system that dispenses only to a specific use system. 　 Bulk distri