F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems

 NOTICE: This Standard was completely rewritten in 2024. 1  Purpose1.1  This Guide defines components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS.2  Scope2.1  This Guide applies to BCDS used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer manufacturing processes. Referenced Standards and Documents (purchase separately)SEMI F39 — Guide for Chemical Blending SystemsSEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing Revision HistorySEMI F31-0724 (complete rewrite)SEMI F31-0313 (technical revision)SEMI F31-0698 (first published)