F03900 - SEMI F39 - Guide for Chemical Blending Systems

 This Guide establishes terminology, blend technique classification(s), system specification(s), performance characterization, and qualification methods for liquid chemical blending equipment. This Guide applies to chemical blending equipment used within a semiconductor manufacturing facility for the purposes of producing chemicals used for wafer processing. Referenced SEMI Standards (purchase separately)SEMI C1 — Guide for the Analysis of Liquid ChemicalsSEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final AssembliesSEMI E49.2 — Guide for the Qualification of Polymer Assemblies Used for Liquid Chemical Systems in Semiconductor EquipmentSEMI F31 — Guide for Bulk Chemical Distribution SystemsSEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor ProcessingSEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution SystemsSEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Revision HistorySEMI F39-1223 (complete rewrite)SEMI F39-0315 (complete rewrite)SEMI F39-0699 (first published)