C00300 - SEMI C3 - Specification for Gases

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 2, 2017. Available at www.semiviews.org and www.semi.org in March 2017; originally published in 1981; previously published April 2013.   Recognizing the importance of impurity content of gases in the manufacture of semiconductors, suppliers responded by introducing products with improved analytical characterization, notably for trace impurities. 　 The SEMI Gases Committee began its efforts in the spring of 1979. With this publication, the committee establishes the definitions, general procedures, specifications, and analytical procedures for the gases listed in the index. 　 Products which meet all of the requirements may be described as ‘meeting SEMI Specifications.’ 　 Where an analytical procedure different from that provided is substituted by a supplier or user, the burden of proof is on said supplier or us