C01500 - SEMI C15 - Test Method for ppm and ppb Humidity Standards

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 16, 2016. Available at www.semiviews.org and www.semi.org in June 2016; originally published in 1995; previously published February 2012. 　 This Test Method will determine whether or not the quantity of moisture delivered by a gaseous moisture standard is in agreement with that predicted for the standard on the basis of physical principles. It is expected that this Test Method will be used to validate moisture standards before they are first placed in use, when deviation from expected performance is likely or suspected, and at other times as seems necessary. 　 This Test Method assumes the existence of a reliable moisture analyzer. Although extensive precautions are described to ensure the validity of the analyzer, it is always possible that the test could yield a faulty result through some unforeseen defect in