G00600 - SEMI G6 - Test Method for Seal Ring Flatness

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.   This Specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than 0.330 in. × 0.330 in.   Referenced SEMI Standards (purchase separately) None.   Revision History SEMI G6-89 (technical revision) SEMI G6-84 (technical revision) SEMI G6-83 (first published)