F07400 - SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems

 This document is a test method for evaluating metal seal designs use in gas delivery systems. It covers both surface-mounted gas systems and conventional metal face seal fitting systems.　Referenced SEMI Standards SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components