C01600 - SEMI C16 - Guide for Precision and Data Reporting Practices
$187.00
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This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published in 1997; previously published March 2005. NOTICE: This document was balloted and approved for withdrawal in 2010. To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI specification. Referenced SEMI StandardsSEMI C1 — Specifications for Reagents
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