E05300 - SEMI E53 - Event Reporting

This standard was technically approved by the global Information & Control Committee and is the direct responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be published July 2004. Originally published December 1996.   Access to process data in equipment is crucial for effective process monitoring and control in a semiconductor manufacturing facility. This standard addresses the communication needs of semiconductor equipment and other factory objects, such as cell controllers or recipe servers, with respect to the timely collection and reporting of such data. The purpose of this standard is to provide a general purpose set of event reporting services that may be offered by equipment suppliers. This document may be referenced, in whole or in part, by other standards addressing higher level application domains. The communications se