C02100 - SEMI C21 - Specification and Guide for Ammonium Hydroxide

 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1  Purpose1.1  The purpose of this Standard is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This Standard also provides guidelines for grades of ammonium hydroxide for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.2  Scope2.1  The scope of this Standard is all grades of ammonium hydroxide used in the semiconductor industry. Referenced SEMI Standards (purchase separately)SEMI C1 — Guide for the Analysis of Liquid Chemicals Revision HistorySEMI C21-0618 (technical revision)SEMI C21-0708 (technical revision)SEMI C21-0301 (technical revision)SEMI C21-0600 (technical revision)SEMI C21-0699 (first published)