D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package

 1  Purpose1.1  This Standard specifies the electrostatic properties required for cases used for transportation of photomasks and blanks used in FPD manufacturing to reduce the risk of electrostatic discharge (ESD) damage to photomasks and blanks during transportation or storage.2  Scope2.1  This Standard provides the specifications of the electrostatic properties of the basic packaging of cases used for transportation of photomasks and blanks used in FPD manufacturing. Referenced SEMI Standards (purchase separately)None. Revision HistorySEMI D88-0325 (first published)