E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

 1  Purpose1.1  This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment.2  Scope2.1  This Specification defines six mutually exclusive, basic equipment states for all of the conditions and associated periods of time for an equipment system during an observation period. One equipment state called the unscheduled downtime state (UDT) defines a ‘failed’ condition for an equipment system. The measurement of equipment system reliability in this Specification concentrates on the relationship between equipment system failures and equipment system usage.2.2  All metrics defined herein are applicable to equipment systems that include subsystems, noncluster tools, single-path cluster tools (SPCTs), equipment module