E05800 - SEMI E58 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

This standard was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Regional Standards Committee on October 19, 2000. Initially available at www.semi.org January 2001; to be published March 2001. Originally published June 1997.   NOTICE: The designation of SEMI E58 was updated during the 0703 publishing cycle to reflect the reapproval of SEMI E58.1.   This document provides standards for implementing and collecting SEMI E10 state changes at the equipment level per SEMI E10. SEMI E10 defines various terms and equipment states but was not written specifically for application by automated equipment. This document is intended to provide a consistent interpretation of these equipment states through formal state model methodology. ARAMS defines concepts, behavior, and message services to support the integration of automated systems