E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces

 1  Purpose1.1  The purpose is to provide guidance for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below.2  Scope2.1  The measurement methods described herein can be applied to characterize the general electrostatic charge, voltage, field level(s), and electrostatic discharge (ESD) on objects and surfaces in semiconductor manufacturing environments. Acceptable equipment, calibration, and measurement techniques are described in this Standard. Appendices include background information on the equipment specified and calibration procedures, as well as information and advice on performing a useful general electrostatic survey. Referenced SEMI Standards (purchase separately)SEMI E33 — Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) Revision HistorySEMI E43-0813 (Reapproved 0824)SEMI E43-0813 (Reapproved 1019)SEMI E43-0813 (technical revision)SEMI E43-1108 (complete rewrite)SEMI E43-0301 (technical revision)SEMI E43-95 (first published)