E04500 - SEMI E45 - Test Method for the Determination of Inorganic Contamination from Minienvironments Using VPD-TXRF, VPD-AAS, or VPD/ICP-MS

NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.   This Test Method provides the analytical procedures to determine the level of inorganic contamination from a minienvironment. This Document relates to inorganic impurities, which includes metallic contaminants, whether they occur as atoms, molecules, or particles. The number of metals to be analyzed is restricted to the four elements sodium (Na), calcium (Ca), iron (Fe), and copper (Cu) in order to rapidly characterize mini-environments from a practicable point of view. While Na, Ca, and Fe represent one ensemble of highly detrimental impurities with respect to contamination from human sources (Na), the environment (Ca), or from equipment and corrosive effects (Fe), Cu is analyzed due to its increasing importance in semiconductor manufacturing. Additiona