E10800 - SEMI E108 - Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments Using Gas Chromatography/Mass Spectroscopy

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Standard is to define a test method for the determination of the outgassing organic contamination from minienvironments used for storage and transport of wafers using gas chromatography/mass spectroscopy (GC/MS). This Test Method is intended as an alternative to SEMI E46. The main difference between SEMI E46 and this Document is that SEMI E46 defines a test method which is based on ion mobility spectroscopy (IMS) as the measurement technique while this Standard is based on GC/MS in combination with thermal desorption. Additionally, this Test Method provides a procedure for testing the outgassing of organic compounds in a complete minienvironment. The results of SEMI E46 and this Document are given in different units.The test method provid