E04701 - SEMI E47.1 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.   This Standard partially specifies the FOUPs used to transport and store 300 mm wafers in an IC manufacturing facility. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the physical interfaces (other than the door mechanism and kinematic couplings) for FOUPs are specified; no materials requirements or micro-contamination limits are given. The enclosure specified in this Standard can be a sealed minienvironment, but it could also just be a box with well-defined interfaces.