E04900 - SEMI E49 - Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies

 1  Purpose1.1  The purpose of this overview Standard is to provide a basic set of terminology and reference documents for SEMI E49.2, SEMI E49.4, SEMI E49.5, SEMI E49.6, SEMI E49.7, SEMI E49.8 and SEMI E137.2  Scope2.1  This Standard contains terminology and reference documents used in SEMI E49.2, SEMI E49.4, SEMI E49.5, SEMI E49.6, SEMI E49.7, SEMI E49.8, and SEMI E137, which will reference performance and method standards as well as recommended practices.2.1.1  The SEMI E49 Subordinate Standards are organized by types of piping distribution systems: gas, DI/chemical, solvent, and by types of assembly and testing procedures: subassembly for stainless steel, subassembly for polymer and final tool assembly. Final assemblies should be tested or validated for all appropriate parameters (e.g., purity, integrity, failure rate) as specified in the applicable SEMI E49 Subordinate Standards.2.1.2  The piping distribution Subordinate Standards (SEMI E49.2 through SEMI E49.8) include guidelines